分批式净化系统：
- The original sealed structure has enabled the atmospheric process.
- With the ultra high HEPA filter adopted,the maximum available temperature at 500℃ has been achieved.
- Cycle time reduction is possible by oven rapid cooling system and/or speedy substrate-transfer.
| Available glass size | ~W730×L920mm | |
|---|---|---|
| Temperature range | 80~500℃ | |
| Temperature uniformity | ±5℃ | |
| Cleanliness | Class 10 (0.3μm) | |
| Applications | A wide variety of Annealing of LTPS & TFT |
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